000 00464nam a22001817a 4500
005 20240924112236.0
008 220223b2018 |||||||| |||| 00| 0 eng d
020 _a9780824758240
_c995
040 _aAVIT
041 _aENGLISH
100 _aAllen, James J
110 _bMechanical
245 _aMicro Electro Mechanical System Design
_cAllen, James J
260 _aColumbus
_bTaylor and Francis
_c2018
300 _a451
650 _aMechanical
942 _cBK
999 _c77054
_d77054