TY  - GEN
AU  - Balasinski	 Artur
ED  - 
TI  - Design For Manufacturability: From 1D to 4D for 90-22 nm Technology Nodes
SN  - 9781071603994
U1  - 620 
PY  - 2020///
CY  - Switzerland
PB  - Springer
KW  - Mechanical
ER  -